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The Ergoloader facilitates microchip manufacture
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An Ergoloader with a FOUP on the floor of a clean room used for microchip
manufacture. |
Microchips used in computers are manufactured in the semiconductor
industry in clean rooms, commonly known as Fabs, where on average between
300 and 400 processing steps, many of them chemical in nature, are required
to make a microchip. Person guided vehicles (PGVs) are used to manually
transport the batches of chips between process tools in the Fabs.
Industries Development Corporation (1996) Ltd, also known as IDC, a
BATEMAN subsidiary company based in Yokneam, Israel, has now sold in
excess of 200 of its PGVs, known as Ergoloaders. The clients have been
several of the most prominent manufacturers of microchips in the USA,
the Far East, including Japan, and Europe. The Ergoloader is a Class
1 clean- room compatible design conforming to industry loadport standards
and fitted with compatible PGV self-aligning and latching docking mechanisms.
Ergoloaders run on four castor wheels, permitting the operator to push
and manoeuvre the vehicle easily and precisely into position and ensuring
that this time-consuming part of the whole process is performed as quickly
as possible. Stacks of silicon wafers, up to 300 mm in diameter, are
carried on the Ergoloader in containers known as FOUPs, the total weight
of which can be almost 9 kg when containing 25 wafers.
The vibration-absorbing suspension dampens any vibration resulting from
the movement of the wheels over the ventilation holes in the clean-room
floors, minimising possible damage to the chips
Depending on the model, either one or two FOUPs can be carried
by an Ergoloader. The two-FOUP model has two side-by-side carriers with
independent cam-actuated loading devices. The single FOUP model is of
identical design, but with a smaller frame is somewhat more manoeuvrable
than the two-FOUP model.
Ergoloaders are manufactured using electro-polished stainless steel,
providing surfaces which can easily be cleaned, in line with the high
level of purity demanded in clean rooms.
Please contact Zvi Alon on +27-11-899-3292
Email enquiries@bateman.co.za
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